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Proceedings Paper

Design of prototype scientific CMOS image sensors
Author(s): Paul Vu; Boyd Fowler; Chiao Liu; Janusz Balicki; Steve Mims; Hung Do; Dan Laxson
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Paper Abstract

We present the design and test results of a prototype 4T CMOS image sensor fabricated in 0.18-μm technology featuring 20 different 6.5 μm pixel pitch designs. We review the measured data which clearly show the impact of the pixel topologies on sensor performance parameters such as conversion gain, read noise, dark current, full well capacity, non-linearity, PRNU, DSNU, image lag, QE and MTF. Read noise of less than 1.5e- rms and peak QE greater than 70%, with microlens, are reported.

Paper Details

Date Published: 10 July 2008
PDF: 9 pages
Proc. SPIE 7021, High Energy, Optical, and Infrared Detectors for Astronomy III, 702103 (10 July 2008); doi: 10.1117/12.790229
Show Author Affiliations
Paul Vu, Fairchild Imaging (United States)
Boyd Fowler, Fairchild Imaging (United States)
Chiao Liu, Fairchild Imaging (United States)
Janusz Balicki, Fairchild Imaging (United States)
Steve Mims, Fairchild Imaging (United States)
Hung Do, Fairchild Imaging (United States)
Dan Laxson, Fairchild Imaging (United States)


Published in SPIE Proceedings Vol. 7021:
High Energy, Optical, and Infrared Detectors for Astronomy III
David A. Dorn; Andrew D. Holland, Editor(s)

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