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Proceedings Paper

Production of extreme ultraviolet (EUV) quality silicon carbide (SiC) aspheric optics
Author(s): Jay Schwartz; Andrea Arneson; Joseph Robichaud
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Paper Abstract

L-3 Communications, SSG-Tinsley reports the optical performance demonstrated with an EUV quality aspheric mirror. The off axis ellipsoidal reflector demonstrates a surface figure of < 3 nm RMS and a surface finish which ranges from 3 - 7 Angstroms RMS depending on the spatial period of interest. Interferometric data is provided along with surface roughness results obtained with phase measuring microscopy. The capability to produce high quality SiC aspheric optics, combined with the inherent thermal stability associated with SiC, enables a number of advanced mission concepts, including next generation solar observing.

Paper Details

Date Published: 23 July 2008
PDF: 12 pages
Proc. SPIE 7018, Advanced Optical and Mechanical Technologies in Telescopes and Instrumentation, 70180U (23 July 2008); doi: 10.1117/12.789731
Show Author Affiliations
Jay Schwartz, L-3 Communications, SSG-Tinsley, Inc. (United States)
Andrea Arneson, Tinsley Labs. (United States)
Joseph Robichaud, L-3 Communications, SSG-Tinsley, Inc. (United States)


Published in SPIE Proceedings Vol. 7018:
Advanced Optical and Mechanical Technologies in Telescopes and Instrumentation
Eli Atad-Ettedgui; Dietrich Lemke, Editor(s)

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