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Proceedings Paper

Design and fabrication of TES microcalorimeters for x-ray astrophysics in Japan
Author(s): Yuichiro Ezoe; Tomotaka Yoshino; Kazuma Mukai; Hiroshi Yoshitake; Hiroki Akamatsu; Kumi Ishikawa; Takayuki Takano; Ryutaro Maeda; Yoshitaka Ishisaki; Noriko Y. Yamasaki; Kazuhisa Mitsuda; Takaya Ohashi
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Paper Abstract

Our recent development of transition-edge sensor (TES) microcalorimeters for future X-ray astronomical missions such as DIOS is reported. In-house micromaching processes has been established aiming at prompt fabrication of TES devices. With a single-pixel TES microcalorimeter and an Au absorber, the energy resolution of 4.8 eV at 5.9 keV is achieved. 16×16 pixel arrays of TES microcalorimeters are successfully fabricated by using deep dry etching technique. The energy resolution is 11 eV and 26 eV with and without an Au absorber, respectively. The worse energy resolution than a single-pixel TES is due to large decrease of TES sensitivity and increase of transition temperature after etching. The reason for these phenomena is under investigation. In parallel, mushroom-type Au absorber structures are being tested. Furthermore, to precisely measure TES sensitivities and heat capacity, an experimental setup for impedance measurements is established.

Paper Details

Date Published: 24 July 2008
PDF: 9 pages
Proc. SPIE 7021, High Energy, Optical, and Infrared Detectors for Astronomy III, 70211X (24 July 2008); doi: 10.1117/12.788155
Show Author Affiliations
Yuichiro Ezoe, Tokyo Metropolitan Univ. (Japan)
Tomotaka Yoshino, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (Japan)
Kazuma Mukai, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (Japan)
Hiroshi Yoshitake, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (Japan)
Hiroki Akamatsu, Tokyo Metropolitan Univ. (Japan)
Kumi Ishikawa, Tokyo Metropolitan Univ. (Japan)
Takayuki Takano, National Institute of Advanced Industrial Science and Technology (Japan)
Ryutaro Maeda, National Institute of Advanced Industrial Science and Technology (Japan)
Yoshitaka Ishisaki, Tokyo Metropolitan Univ. (Japan)
Noriko Y. Yamasaki, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (Japan)
Kazuhisa Mitsuda, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency (Japan)
Takaya Ohashi, Tokyo Metropolitan Univ. (Japan)


Published in SPIE Proceedings Vol. 7021:
High Energy, Optical, and Infrared Detectors for Astronomy III
David A. Dorn; Andrew D. Holland, Editor(s)

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