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Proceedings Paper

New technologies for tunable micro-optics
Author(s): Ch. Friese; A. Werber; F. Krogmann; R. Shaik; W. Mönch; H. Zappe
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Paper Abstract

Microsystems technology may be employed for the conceptualization and fabrication of new types of tunable micro-optical components. Tunable polymer membrane-based micro-lenses, tunable liquid lenses and lens arrays as well as deformable membrane mirrors are presented here.

Paper Details

Date Published: 28 April 2008
PDF: 9 pages
Proc. SPIE 6993, MEMS, MOEMS, and Micromachining III, 699306 (28 April 2008); doi: 10.1117/12.787018
Show Author Affiliations
Ch. Friese, Univ. of Freiburg (Germany)
A. Werber, Univ. of Freiburg (Germany)
F. Krogmann, Univ. of Freiburg (Germany)
R. Shaik, Univ. of Freiburg (Germany)
W. Mönch, Univ. of Freiburg (Germany)
H. Zappe, Univ. of Freiburg (Germany)

Published in SPIE Proceedings Vol. 6993:
MEMS, MOEMS, and Micromachining III
Hakan Urey, Editor(s)

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