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Proceedings Paper

The role of plasmon-polaritons and waveguide modes in surface modification of semiconductors by ultrashort laser pulses
Author(s): G. A. Martsinovsky; G. D. Shandybina; D. S. Smirnov; S. V. Zabotnov; L. A. Golovan; V. Yu. Timoshenko; P. K. Kashkarov
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Paper Abstract

Polarization-dependent ripples were formed at silicon surfaces under femtosecond laser irradiation. Proposed theoretical model describes changes in optical response of semiconductor surface, induced by generation of nonequilibrium electron-hole plasma, and explains mechanism of surface polaritons and waveguide modes exciatation during femtosecond laser pulse action.

Paper Details

Date Published: 15 January 2008
PDF: 9 pages
Proc. SPIE 6985, Fundamentals of Laser Assisted Micro- and Nanotechnologies, 698502 (15 January 2008); doi: 10.1117/12.786844
Show Author Affiliations
G. A. Martsinovsky, St. Petersburg State Univ. of Information Technologies, Mechanics and Optics (Russia)
G. D. Shandybina, St. Petersburg State Univ. of Information Technologies, Mechanics and Optics (Russia)
D. S. Smirnov, St. Petersburg State Univ. of Information Technologies, Mechanics and Optics (Russia)
S. V. Zabotnov, M.V. Lomonosov Moscow State Univ. (Russia)
L. A. Golovan, M.V. Lomonosov Moscow State Univ. (Russia)
V. Yu. Timoshenko, M.V. Lomonosov Moscow State Univ. (Russia)
P. K. Kashkarov, M.V. Lomonosov Moscow State Univ. (Russia)


Published in SPIE Proceedings Vol. 6985:
Fundamentals of Laser Assisted Micro- and Nanotechnologies

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