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Proceedings Paper

Quick and non-invasive method for characterisation of profiles of nano-photonics structures
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Paper Abstract

Depth and profile information of one or two-dimensional photonic crystals can be obtained through measurements of reflective diffractive patters obtained from the structures and subsequent numerical analysis. The technique is known as a scatterometry. The method is non-invasive and fast, and competitive to the alternatives of AFM, SEM etc. In our paper we presented results of investigation 1D photonic crystal fabricated in GaN with period Λ = 400 nm, fill factor ff = 50% and depth d = 400 nm. Using computer algorithm of Rigorous Coupled Wave Analysis (RCWA) and measuring diffracted light we extracted the profile parameters of Λ = 420 nm, ff = 51%, d = 400 nm. Possibility of application of our method for analysis 2D photonic crystals is discussed also.

Paper Details

Date Published: 21 April 2008
PDF: 8 pages
Proc. SPIE 6989, Photonic Crystal Materials and Devices VIII, 698917 (21 April 2008); doi: 10.1117/12.785813
Show Author Affiliations
Szymon Lis, Wroclaw Univ. of Technology (Poland)
Rafal Dylewicz, Univ. of Glasgow (United Kingdom)
Jarosław Myśliwiec, Wroclaw Univ. of Technology (Poland)
Andrzej Miniewicz, Wroclaw Univ. of Technology (Poland)
Sergiusz Patela, Wroclaw Univ. of Technology (Poland)

Published in SPIE Proceedings Vol. 6989:
Photonic Crystal Materials and Devices VIII
Richard M. De La Rue; Ceferino López; Michele Midrio; Pierre Viktorovitch, Editor(s)

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