Share Email Print
cover

Proceedings Paper

Holographic fabrication of hierarchical nanostructures using microprism array toward optofluidic integration
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Holographic lithography provides a highly compatible and facile way to fabricate multi-dimensional periodic nanostructures. Periodic nanostructures have useful applications not only as biological substrates or catalytic supports but also as nanophotonic devices with various photonic properties such as photonic band-gap (PBG), localized surface plasmon resonance (LSPR) or surface enhanced Raman scattering (SERS). In combination with single refracting prism holographic lithography and conventional photolithography, we could achieve the micrometer-scale patterns of periodic nanostructures which can be integrated in microfluidic chip. With the help of conventional MEMS technologies, Arrays of pyramid shape and top-cut pyramid shape microprism can be prepared. Single laser exposure step through the microprism arrays (MPAs) can be generate multiscale patterns of 2D and 3D nanostructures. As prepared nanostructures combined with microfluidic chip is a highly efficient optofluidic platform which is applicable to the chemical and biosensors.

Paper Details

Date Published: 21 April 2008
PDF: 8 pages
Proc. SPIE 6989, Photonic Crystal Materials and Devices VIII, 69891U (21 April 2008); doi: 10.1117/12.784963
Show Author Affiliations
Seung-Kon Lee, Korea Advanced Institute of Science and Technology (South Korea)
Hyo Sung Park, Korea Advanced Institute of Science and Technology (South Korea)
Sung Gyu Park, Korea Advanced Institute of Science and Technology (South Korea)
Jun Hyuk Moon, Sogang Univ. (South Korea)
Seung-Man Yang, Korea Advanced Institute of Science and Technology (South Korea)


Published in SPIE Proceedings Vol. 6989:
Photonic Crystal Materials and Devices VIII
Richard M. De La Rue; Ceferino López; Michele Midrio; Pierre Viktorovitch, Editor(s)

© SPIE. Terms of Use
Back to Top