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Proceedings Paper

Scanning nanojet lithograph and microscope
Author(s): Igor A. Timoshchenko
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Paper Abstract

The paper under consideration is actually an attempt to theoretically prove the possibility of creation of a sequential nanolithography method with ultimate parameters by using liquid nanojets from reactive elements in order to put the nanotechnology methods on a solid commercial basis. Detection of secondary radiation forming on the contact place of jet and target enables to use the device as scanning microscope.

Paper Details

Date Published: 28 December 2007
PDF: 5 pages
Proc. SPIE 6937, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2007, 69373R (28 December 2007); doi: 10.1117/12.784903
Show Author Affiliations
Igor A. Timoshchenko, Belarusian State Univ. (Belarus)


Published in SPIE Proceedings Vol. 6937:
Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2007

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