Share Email Print
cover

Proceedings Paper

Calibration procedure of extreme ultraviolet detectors
Author(s): J. Mikołajczyk; Z. Bielecki; W. Kołosowski; E. Sędek
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The paper presents a procedure and laboratory setup for calibration of extreme ultraviolet detectors. The procedure determinates a responsivity of a photodiode applied in the technology of EUV radiation. The main elements of the described system are a gas-puff laser plasma source, metrology chamber with an optical beam splitter and a model instrument. The applied measurement method is based on a comparison of the detected signals from the model instrument and the tested detector. The reduction of an error resulting from instabilities of the source radiation is ensured using a special construction of the optical beam splitter. Because of the cost and the metrology features, the presented setup is future alternative for small factories and laboratories producing EUV detectors. In the paper, analysis and preliminary research of the setup are described.

Paper Details

Date Published: 28 December 2007
PDF: 6 pages
Proc. SPIE 6937, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2007, 69370F (28 December 2007); doi: 10.1117/12.784595
Show Author Affiliations
J. Mikołajczyk, Military Univ. of Technology (Poland)
Z. Bielecki, Military Univ. of Technology (Poland)
W. Kołosowski, Telecommunications Research Institute (Poland)
E. Sędek, Telecommunications Research Institute (Poland)


Published in SPIE Proceedings Vol. 6937:
Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2007

© SPIE. Terms of Use
Back to Top