Share Email Print

Proceedings Paper

Atmospheric plasma generation for LCD panel cleaning
Author(s): Gyu-Sik Kim; Chung-Yuen Won; Ju-Yeop Choi; C. H. Yim
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

UV lamp systems have been used for cleaning of display panels of TFT LCD or Plasma Display Panel (PDP). However, the needs for high efficient cleaning and low cost made high voltage plasma cleaning techniques to be developed and to be improved. Dielectric-barrier discharges (DBDs), also referred to as barrier discharges or silent discharges have for a long time been exclusively related to ozone generation. In this paper, a 6kW high voltage plasma power supply system was developed for LCD cleaning. The -phase input voltage is rectified and then inverter system is used to make a high frequency pulse train, which is rectified after passing through a high-power transformer. Finally, bi-directional high voltage pulse switching circuits are used to generate the high voltage plasma. Some experimental results showed the usefulness of atmospheric plasma for LCD panel cleaning.

Paper Details

Date Published: 7 January 2008
PDF: 6 pages
Proc. SPIE 6794, ICMIT 2007: Mechatronics, MEMS, and Smart Materials, 67940B (7 January 2008); doi: 10.1117/12.784171
Show Author Affiliations
Gyu-Sik Kim, The Univ. of Seoul (South Korea)
Chung-Yuen Won, SungKyunKwan Univ. (South Korea)
Ju-Yeop Choi, Kwangwoon Univ. (South Korea)
C. H. Yim, Seoul National Univ. of Technology (South Korea)

Published in SPIE Proceedings Vol. 6794:
ICMIT 2007: Mechatronics, MEMS, and Smart Materials

© SPIE. Terms of Use
Back to Top