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Proceedings Paper

Design and optimization of a novel 2-D optical excited self-resonant microaccelerometer
Author(s): Yu Liu; Linqing Liao; Guangze Zheng; Guochao Wang; Hongyun Yang; Rui Xu
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Paper Abstract

A novel 2-D optical excited self-resonant microaccelerometer is presented. And its optical characteristics are discussed in theory. Based on genetic algorithm, the thickness of the polysilicon microbeam and the height of the vacuum cavity are optimized to obtain the optimum of light transmissivity.

Paper Details

Date Published: 9 January 2008
PDF: 5 pages
Proc. SPIE 6794, ICMIT 2007: Mechatronics, MEMS, and Smart Materials, 67943C (9 January 2008); doi: 10.1117/12.783862
Show Author Affiliations
Yu Liu, Chongqing Institute of Technology (China)
Linqing Liao, Chongqing Institute of Technology (China)
Guangze Zheng, Chongqing Institute of Technology (China)
Guochao Wang, Chongqing Institute of Technology (China)
Hongyun Yang, Chongqing Institute of Technology (China)
Rui Xu, Chongqing Institute of Technology (China)


Published in SPIE Proceedings Vol. 6794:
ICMIT 2007: Mechatronics, MEMS, and Smart Materials

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