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Proceedings Paper

Optical constants measurement system for a:H silicon film
Author(s): Quan Jiang; Zu-lun Lin; Jian-bo Cheng; Kang-cheng Qi; Chang-jun Ge
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Paper Abstract

A type of optical constants measuring system controlled by a computer was developed. The system consists of a focusing lens, a monochromator that is composed of a diffraction grating and a photomultiplier, a high-precision voltage amplifier, a level buffer circuit, a data-sampling card composed of a A/D converting circuits, a interrupt circuit and I/O interface circuits and a PC. The heart of the system is a PC, which is served as data sampling, processing and calculating unit. The transmission spectrum of α:H silicon film is measured by this system. Then, a kind of envelopes calculation method proposed by Manifacier is used to calculate refractive index, absorptive coefficient and optical band. The accuracy is of the same orders as for the iteration method.

Paper Details

Date Published: 17 January 2008
PDF: 7 pages
Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 67235W (17 January 2008); doi: 10.1117/12.783833
Show Author Affiliations
Quan Jiang, Univ. of Electronic Science and Technology of China (China)
Zu-lun Lin, Univ. of Electronic Science and Technology of China (China)
Jian-bo Cheng, Univ. of Electronic Science and Technology of China (China)
Kang-cheng Qi, Univ. of Electronic Science and Technology of China (China)
Chang-jun Ge, Univ. of Electronic Science and Technology of China (China)


Published in SPIE Proceedings Vol. 6723:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Junhua Pan; James C. Wyant; Hexin Wang, Editor(s)

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