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Proceedings Paper

High precision sensing system for vibration distribution measurement
Author(s): Guotian He; Chaowei Tang; Lijuan Zhao; Mingyi Fu
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Paper Abstract

Aimed at the study actuality of displacement distribution measurement of each point on the surface in the micro- motion status, a new vibration displacement distribution interferometry combining sinusoidal phase-modulating(SPM) with Fourier transform is proposed in the paper, its principle and the influence on the measuring precision caused by noise is analyzed in theory. The corresponding interferometer adopting this technique above mentioned was developed The interferometer can be applied into vibration measurement, and vibration distribution measurement. By measuring a mirror's microvibration, the vibration distribution measurement was realized, its repeatable measuring precision was 5.61nm. Experimental results validated the feasibility of the interferometer.

Paper Details

Date Published: 17 January 2008
PDF: 5 pages
Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 67235T (17 January 2008); doi: 10.1117/12.783822
Show Author Affiliations
Guotian He, Chongqing Univ. (China)
Shanghai Institute of Optics and Fine Mechanics (China)
Chaowei Tang, Chongqing Univ. (China)
Lijuan Zhao, Chongqing Univ. (China)
Mingyi Fu, Chongqing Univ. (China)


Published in SPIE Proceedings Vol. 6723:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Junhua Pan; James C. Wyant; Hexin Wang, Editor(s)

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