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Proceedings Paper

Research on path planning and data processing system for high-precision aspheric measurement
Author(s): Jun-jun Ye; Jiang Guo; Yin-biao Guo
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Paper Abstract

Three methods for axisymmetric aspheric measuring are put forward and estimated. In accordance with the requirements of high-precision compensation machining and polishing, a data processing system with high accuracy is presented. The monotonous and super-quadric aspheric equations are used to verify the nonlinear least square fitting method respectively. The result of this investigation shows the adopted algorithm can complete the high-precise curve fitting exactly, and it can effectively evaluate the surface quality of optical component.

Paper Details

Date Published: 17 January 2008
PDF: 6 pages
Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 67235R (17 January 2008); doi: 10.1117/12.783800
Show Author Affiliations
Jun-jun Ye, Xiamen Univ. (China)
Jiang Guo, Xiamen Univ. (China)
Yin-biao Guo, Xiamen Univ. (China)


Published in SPIE Proceedings Vol. 6723:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Junhua Pan; James C. Wyant; Hexin Wang, Editor(s)

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