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Proceedings Paper

Application of SPM interferometry in MEMS vibration measurement
Author(s): Chaowei Tang; Guotian He; Changbiao Xu; Lijuan Zhao; Jun Hu
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Paper Abstract

The resonant frequency measurement of cantilever has an important position in MEMS(Micro Electro Mechanical Systems) research. Meanwhile the SPM interferometry is a high-precision optical measurement technique, which can be used in physical quantity measurement of vibration, displacement, surface profile. Hence, in this paper we propose to apply SPM(SPM) interferometry in measuring the vibration of MEMS cantilever and in the experiment the vibration of MEMS cantilever was driven by light source. Then this kind of vibration was measured in nm precision. Finally the relational characteristics of MEMS cantilever vibration under optical excitation can be gotten and the measurement principle is analyzed. This method eliminates the influence on the measuring precision caused by external interference and light intensity change through feedback control loop. Experiment results prove that this measurement method has a good effect.

Paper Details

Date Published: 17 January 2008
PDF: 5 pages
Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 67235P (17 January 2008); doi: 10.1117/12.783793
Show Author Affiliations
Chaowei Tang, Chongqing Univ. (China)
Guotian He, Chongqing Univ. (China)
Shanghai Institute of Optics and Fine Mechanics (China)
Changbiao Xu, Chongqing Univ. of Posts and Telecommunications (China)
Lijuan Zhao, Chongqing Univ. (China)
Jun Hu, Chongqing Univ. (China)


Published in SPIE Proceedings Vol. 6723:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Junhua Pan; James C. Wyant; Hexin Wang, Editor(s)

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