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Proceedings Paper

Method for removing temperature shifting during measurement of large mirrors in grinding process
Author(s): Hongwei Jing; Long Kuang; Bin Fan
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Paper Abstract

In order to provide precise feedbacks to manufactures, the effect of temperature shifting must be removed from the measurement results. To remove the effect of temperature shifting to measurement results, large mirrors were measured twice. The first measurement procedure was done fast, often for several points a line. These measured data were set as datum for removing the temperature shifting. The second measurement procedure was done densely, for about 100 points a line. After the abovementioned two measurement procedures, a temperature-shifting-removing program was developed to remove temperature shifting, which fits the densely measured data to the datum data. To verify the validity of this temperature-shifting-removing method, we have made a comparison of the results of a spherical mirror 200mm in diameter measured by this method and the results of the same mirror measured by using Form Talysurf PGI 1240 from Taylor Hobson. Two measurement results show good agreement.

Paper Details

Date Published: 27 November 2007
PDF: 5 pages
Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 67235K (27 November 2007); doi: 10.1117/12.783785
Show Author Affiliations
Hongwei Jing, Institute of Optics and Electronics (China)
Long Kuang, Institute of Optics and Electronics (China)
Bin Fan, Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 6723:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Junhua Pan; James C. Wyant; Hexin Wang, Editor(s)

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