Share Email Print
cover

Proceedings Paper

Research on errors of half-waveplate and quarter-waveplates in polarized laser interferometer
Author(s): Jun Yang; Li Duan; Zhi-hai Liu; Li-bo Yuan
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Based on Jones matrices theory and polarized phase-shift technology, one of the most important elements of polarized interferometer that is the error source and action mechanism of wave plates is researched. There are two reasons that cause wave plate error, one of which is immanent parameter error and the other one is location error. When environmental temperature changes and vibratory jam exists, the error of different elements will couple, which makes nonlinear error on the polarized interferometer more complex. It opens a door for selecting wave plates, adjusting light set-up and compensating error. In this paper, the point is the experiments on the wave plate error, which is on the base of theory. Every single error on the polarized interferometer is discussed with the isolation of each wave plate, so that the character of nonlinear error will be reached with composite error. In the experiments, difference delay angle error of two 1/4 wave plates is -10 degrees~10 degrees and location angle error is -5 degrees~5 degrees in interferometer. The aim of this paper is to realize the mechanism of nonlinear errors' appearance and the varying rule of nonlinear errors in laser interferometer. The effects of the environmental factors (temperature and oscillation) on the measurement accuracy and the compensation for the environmental changes are also studied. All above provide error remove or compensation for laser interferometer in nanometer level measurement with theoretical foundation and search after application.

Paper Details

Date Published: 26 November 2007
PDF: 9 pages
Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 672353 (26 November 2007); doi: 10.1117/12.783741
Show Author Affiliations
Jun Yang, Harbin Engineering Univ. (China)
Li Duan, Harbin Engineering Univ. (China)
Zhi-hai Liu, Harbin Engineering Univ. (China)
Li-bo Yuan, Harbin Engineering Univ. (China)


Published in SPIE Proceedings Vol. 6723:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Junhua Pan; James C. Wyant; Hexin Wang, Editor(s)

© SPIE. Terms of Use
Back to Top