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Proceedings Paper

Research on dual-purpose optical aspheric surface testing instrument
Author(s): Jianchun Liu; Yinbiao Guo; Gujin Liu
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Paper Abstract

Aiming at various influential factors during ultra-precision aspheric surface testing, besides improving the accuracy of moving stage and measuring probe, systematic errors in measurements should be minimized. In this paper, the principle of measuring, configuration and design of a new type dual-purpose optical aspheric testing instrument are introduced. Both contact and non-contact measurement methods are used. The performance and cost of this dual-purpose instrument are better than single purpose instrument.

Paper Details

Date Published: 17 January 2008
PDF: 7 pages
Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 67234Q (17 January 2008); doi: 10.1117/12.783663
Show Author Affiliations
Jianchun Liu, Xiamen Univ. (China)
Xiamen Univ. of Technology (China)
Yinbiao Guo, Xiamen Univ. (China)
Gujin Liu, Xiamen Univ. (China)


Published in SPIE Proceedings Vol. 6723:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Junhua Pan; James C. Wyant; Hexin Wang, Editor(s)

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