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Proceedings Paper

ZnO nanocrystalline thin films prepared by ion beam enhanced deposition method
Author(s): N. Y. Yuan; J. H. Li; Z. J. He; G. Li; X. Q. Wang
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Paper Abstract

In-N codoped ZnO nanocrystalline films were prepared on Si and glass substrates by Ion beam enhanced deposition method. The In-N codoped ZnO nanocrystalline films deposited on Si substrates are found to have a preferred (002) orientation, smooth surface and high density. P-type ZnO thin films were obtained. Room temperature photoluminescence measurements indicated that the ZnO nanocrystalline films had two UV emission peaks and several visible emission peaks.

Paper Details

Date Published: 14 November 2007
PDF: 5 pages
Proc. SPIE 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 67224B (14 November 2007); doi: 10.1117/12.783662
Show Author Affiliations
N. Y. Yuan, Jiangsu Polytechnic Univ. (China)
J. H. Li, Jiangsu Polytechnic Univ. (China)
Z. J. He, Jiangsu Polytechnic Univ. (China)
G. Li, Jiangsu Polytechnic Univ. (China)
X. Q. Wang, Jiangsu Polytechnic Univ. (China)


Published in SPIE Proceedings Vol. 6722:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies

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