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Proceedings Paper

Application of two-frequency laser interferometer in dynamic calibrating of long displacement sensor
Author(s): Wanfu Dong; Bin Wu; Fuchun Sun
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Paper Abstract

Difficulties of automatic calibration for long displacement sensors have been overcome by applying two-frequency laser interferometer with two-longitudinal modes for standard displacement. High efficient automatic calibration has been achieved for long displacement sensor of 500mm. The total measuring uncertainty of the system is less than 2μm. The speed of dynamic measurement can be more than 20mm/s. Main work of the calibration is automatically completed by controlling the micro-computer system.

Paper Details

Date Published: 17 January 2008
PDF: 4 pages
Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 672343 (17 January 2008); doi: 10.1117/12.783592
Show Author Affiliations
Wanfu Dong, Chengdu Univ. (China)
Bin Wu, Chengdu Univ. (China)
Fuchun Sun, Chengdu Univ. (China)


Published in SPIE Proceedings Vol. 6723:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Junhua Pan; James C. Wyant; Hexin Wang, Editor(s)

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