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Proceedings Paper

Primary study on ellipsometry of large roughness surface
Author(s): Zuohua Huang; Lijuan Wang; Zhenjiang He; Junfang Chen
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Paper Abstract

Based on the method of space filtering, a subassembly of space filter consisting of lens and filter is introduced and a conventional null ellipsometer has been improved to measure large roughness surface and film with large roughness interface. From theory, the possibility of using space filter in null ellipsometer to get ellipsometric parameters of large roughness surfaces corresponding to the smooth surface is analyzed, and primary experiment is carried out. Experiment results show that the improved null ellipsometer can obtain preferable repeatability and accuracy of optical parameters of large roughness surface and film with large roughness interface.

Paper Details

Date Published: 17 January 2008
PDF: 5 pages
Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 67233U (17 January 2008); doi: 10.1117/12.783562
Show Author Affiliations
Zuohua Huang, South China Normal Univ. (China)
Lijuan Wang, South China Normal Univ. (China)
Zhenjiang He, South China Normal Univ. (China)
Junfang Chen, South China Normal Univ. (China)


Published in SPIE Proceedings Vol. 6723:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Junhua Pan; James C. Wyant; Hexin Wang, Editor(s)

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