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Proceedings Paper

Design and fabrication of soft x-ray transmission phase gratings
Author(s): Keqiang Qiu; Xiangdong Xu; Ying Liu; Yilin Hong; Shaojun Fu
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Paper Abstract

A binary transmission phase grating is designed to operate as a dispersive element used in soft x-ray plasma diagnostic in ICF (inertial confinement fusion). The first and zero orders diffraction efficiency is simulated as a function of wave length and grating thickness. It is shown that the first order diffraction efficiency of a transmission phase grating can be up to 23.3% of the incident light, whereas that is not more than 10% for a conventional amplitude transmission grating. The transmission phase grating is fabricated in gold film supported by polyimide membranes using holography and ion beam etching method. The primary experimental results are presented.

Paper Details

Date Published: 14 November 2007
PDF: 6 pages
Proc. SPIE 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 67223R (14 November 2007); doi: 10.1117/12.783542
Show Author Affiliations
Keqiang Qiu, Univ. of Science and Technology of China (China)
Xiangdong Xu, Univ. of Science and Technology of China (China)
Ying Liu, Univ. of Science and Technology of China (China)
Yilin Hong, Univ. of Science and Technology of China (China)
Shaojun Fu, Univ. of Science and Technology of China (China)


Published in SPIE Proceedings Vol. 6722:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies

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