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Proceedings Paper

Novel method of designing deformable polishing lap
Author(s): Ziqiang Hu; Ning Ling
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Paper Abstract

In aspheric mirror polishing progress, the deformable polishing lap can change the lap surface to fit the surface of aspheric optical mirror. This paper presents a novel method of designing deformable polishing lap by using piezoceramics driver. The rationale of the new type deformable polishing lap is introduced. The calculation of piezoceramics driver deformation is explored and a correction of calculation formula is brought forward. A new type deformable polishing lap 110 mm in diameter was designed and built to polish the aspheric mirror. It consists of an aluminum disk which changes shape continuously under the control of 84 piezoceramics driver. The aspheric surfaces created by the new type deformable polishing lap are measured with micro displacement transducer. The results show that the new type deformable polishing lap can reshape to fit the surface of aspheric mirror and the maximal difference is less than 2um.

Paper Details

Date Published: 29 November 2007
PDF: 7 pages
Proc. SPIE 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 67223C (29 November 2007); doi: 10.1117/12.783523
Show Author Affiliations
Ziqiang Hu, Institute of Optics and Electronics (China)
Graduate School of the Chinese Academy of Sciences (China)
Yantai Univ. (China)
Ning Ling, Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 6722:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies

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