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Proceedings Paper

Benchmarking instrumentation tools for the characterization of microlenses within the EC Network of Excellence on Micro-Optics (NEMO)
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Paper Abstract

Today there exist different commercial micro-optics measurement instruments for the characterization of micro-optical components and microlenses in particular. However there is often a lack of a complete quantitative optical characterization of the latter components. Therefore we will focus in this paper on the optical characterization of all types of refractive microlenses, more in particular spherical and aspherical microlenses. Moreover the results of the performed round robin within the European 6th FP Network of Excellence on Micro-optics "NEMO" will allow us to select the most appropriate instrumentation tools for characterizing refractive microlenses.

Paper Details

Date Published: 25 April 2008
PDF: 9 pages
Proc. SPIE 6995, Optical Micro- and Nanometrology in Microsystems Technology II, 69950J (25 April 2008); doi: 10.1117/12.783514
Show Author Affiliations
H. Ottevaere, Vrije Univ. Brussel (Belgium)
J. Schwider, Friedrich-Alexander-Univ. Erlangen-Nürnberg (Germany)
J. Kacperski, Warsaw Univ. of Technology (Poland)
L. Steinbock, Forschungszentrum Karlsruhe (Germany)
K. Weible, SUSS MicroOptics SA (Switzerland)
M. Kujawinska, Warsaw Univ. of Technology (Poland)
H. Thienpont, Vrije Univ. Brussel (Belgium)


Published in SPIE Proceedings Vol. 6995:
Optical Micro- and Nanometrology in Microsystems Technology II
Christophe Gorecki; Anand Krishna Asundi; Wolfgang Osten, Editor(s)

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