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Proceedings Paper

Interferometric measurements of mid-spatial scale surface irregularities
Author(s): Jiancheng Xu; Qiao Xu; Liqun Chai; Yan Deng
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Paper Abstract

A simple method which can be used to map mid-spatial scale surface irregularities with high signal noise ratio is described. Two major sources of errors are analyzed and removed. One is the contributions of small-scale irregularities of the reference surface, which are subtracted by shifting the test surface laterally by a distance. The other is the spurious response of CCD, which is removed by interpolation function. The presented method is verified by simulations and experiments. It shows that it can measure mid-spatial scale surface irregularities exactly and smaller scale surface irregularities can be obtained by making measurement for a series of the lateral shifting values corresponding to one-half of the pixel space on CCD.

Paper Details

Date Published: 17 January 2008
PDF: 6 pages
Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 67233M (17 January 2008); doi: 10.1117/12.783513
Show Author Affiliations
Jiancheng Xu, Chengdu Fine Optical Engineering Research Ctr. (China)
Qiao Xu, Chengdu Fine Optical Engineering Research Ctr. (China)
Liqun Chai, Chengdu Fine Optical Engineering Research Ctr. (China)
Yan Deng, Chengdu Fine Optical Engineering Research Ctr. (China)


Published in SPIE Proceedings Vol. 6723:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Junhua Pan; James C. Wyant; Hexin Wang, Editor(s)

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