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Proceedings Paper

Analysis of structure and control of the loop-locked ultra-precise 2D flexible hinge stage for optical measurement
Author(s): Jianhuan Zhang; Xiaodong Yang; Lijun Zhang
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Paper Abstract

Although PZT driving stage is a practical and widely used component in optical scanning measurement, its creep, hysteresis, poor long-term stability and the vibration of stage hindered the promotion in driving and positioning accuracy. Based on feedback control, the stage can have nanometer level driving accuracy. For attaching the displacement feedback sensor, a special structure that is called expanded hinge is designed. For getting higher sensitivity, a shallow groove is cut in it. In order to confirm the effect of the additional structure on the performance of the stage, the finite element software is employed, the analysis had been completed, and the simulated results are presented. With the vibration model of the 2D flexible hinge stage, the mathematic model of the vibration control can be achieved, and the PID control system is set up. After the sensors are carefully attached to the corresponding spot and the processing circuit is completed, the simulation and test of the overall performance of the stage can be executed.

Paper Details

Date Published: 27 November 2007
PDF: 6 pages
Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 672338 (27 November 2007); doi: 10.1117/12.783476
Show Author Affiliations
Jianhuan Zhang, Xiamen Univ. (China)
Xiaodong Yang, Xiamen Univ. (China)
Lijun Zhang, Xiamen Univ. (China)


Published in SPIE Proceedings Vol. 6723:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Junhua Pan; James C. Wyant; Hexin Wang, Editor(s)

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