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Proceedings Paper

Matching the residual stress between Hafnia and silica for high reflective mirrors
Author(s): Jiangchuan Hu; Songlin Cheng; Ping Ma; Jin Luo; Zheng Wang
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Paper Abstract

The effects of coating parameters on the stress of silica coating, Hafnia coating have been studied. The aforementioned parameters are the angle of coating tooling, partial oxygen pressure during deposition. The experimental study shows that the parameters are two important parameters. To reduce the compress stress of silica, silica should be deposited at small angle of coating tooling and high partial oxygen pressure. The angle of coating tooling must be small and partial oxygen pressure must be higher still for the Hafnia coatings. According to the stress character of silica coating and Hafnia coating, the stresses are matched in a high reflection mirror. In this deposition technology, the high reflection mirrors also have high laser induce threshold. Which are satisfied the imposed requirement by power laser specifications.

Paper Details

Date Published: 14 November 2007
PDF: 5 pages
Proc. SPIE 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 67222V (14 November 2007); doi: 10.1117/12.783379
Show Author Affiliations
Jiangchuan Hu, Chengdu Fine Optical Engineering Research Ctr. (China)
Songlin Cheng, Chengdu Fine Optical Engineering Research Ctr. (China)
Ping Ma, Chengdu Fine Optical Engineering Research Ctr. (China)
Jin Luo, Chengdu Fine Optical Engineering Research Ctr. (China)
Zheng Wang, Chengdu Fine Optical Engineering Research Ctr. (China)


Published in SPIE Proceedings Vol. 6722:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies

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