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Proceedings Paper

Vectorial shearing interferometer with a high resolution phase shifter
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Paper Abstract

Vectorial shearing interferometer has been used to measure small and large non-rotationally symmetrical wavefronts aberrations. This interferometric system encompasses large and differential wavefront displacements using a high accuracy rotation system incorporated in a Mach-Zehnder interferometer. The rotation system is based on the Risley prism arrangement and it is controlled with an electronic servomotor system by means of an auto-tuning algorithm. We present the servo-mechanical system, electronic interface and algorithms to control the performance of the high resolution rotation device that is used to control the wavefront phase shifting.

Paper Details

Date Published: 17 January 2008
PDF: 8 pages
Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 672330 (17 January 2008); doi: 10.1117/12.783378
Show Author Affiliations
G. García-Torales, Univ. of Guadalajara/CUCEI (Mexico)
J. L. Flores, Univ. of Guadalajara/CUCEI (Mexico)


Published in SPIE Proceedings Vol. 6723:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Junhua Pan; James C. Wyant; Hexin Wang, Editor(s)

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