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Proceedings Paper

Structural and optical properties of Al-doped ZnO films coated by RF magnetron sputtering
Author(s): Yue-Bo Wu; Bo Huang; Liang-Tang Zhang; Jing Li; Sun-Tao Wu
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Paper Abstract

The Al-doped ZnO (AZO) films were deposited on glass by RF magnetron sputtering under different sputtering power: 75W, 120W, 160W and 200W. During the films deposition, the other sputtering conditions were maintained constant. The crystal structures of the AZO films were characterized and analyzed by X-ray diffraction. The surface morphologies of the films were observed by SEM. The transmission spectra of the films were measured using a spectrophotometer within the range from 200 to 800 nm at room temperature. The results indicate each of the films has a preferential c-axis orientation and the grain size increases with the increase of sputtering power. All the films exhibit a high transmittance in visible region and have sharp ultraviolet absorption characteristics.

Paper Details

Date Published: 27 November 2007
PDF: 4 pages
Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 67232P (27 November 2007); doi: 10.1117/12.783325
Show Author Affiliations
Yue-Bo Wu, Xiamen Univ. (China)
Bo Huang, Xiamen Univ. (China)
Liang-Tang Zhang, Xiamen Univ. (China)
Jing Li, Xiamen Univ. (China)
Sun-Tao Wu, Xiamen Univ. (China)


Published in SPIE Proceedings Vol. 6723:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Junhua Pan; James C. Wyant; Hexin Wang, Editor(s)

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