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Proceedings Paper

Specular and diffuse reflectance of silicon photodiodes
Author(s): Yingchun Zhou; Tao Xu; Huaping Chen
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Paper Abstract

Now spectral reflectance of silicon photodiodes is described as the reflectance based on thin-film Fresnel formulas and the known refractive indices of the materials of photodiodes. In this paper the diffuse reflectance of light in Si materials is considered. A precision spectrometer is developed to measure the specular and diffuse reflectance of a silicon photodiode over the wavelength range from 400 to 900 nm. The results are compared with the corresponding values predicted by Fresnel model and diffuse model. It is found that the predicted values by Fresnel model show agreement with experimental values of specular reflectance. The diffuse model can predict both specular reflectance and diffuse reflectance well. This result can be used in auto-calibration technology for photodiode spectral response metrology.

Paper Details

Date Published: 17 January 2008
PDF: 4 pages
Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 67231B (17 January 2008); doi: 10.1117/12.783150
Show Author Affiliations
Yingchun Zhou, Shenzhen Academy of Metrology and Quality Inspection (China)
Tao Xu, Shenzhen Academy of Metrology and Quality Inspection (China)
Huaping Chen, Shenzhen Academy of Metrology and Quality Inspection (China)


Published in SPIE Proceedings Vol. 6723:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Junhua Pan; James C. Wyant; Hexin Wang, Editor(s)

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