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Proceedings Paper

Indirect optical thickness monitoring with stationary test-slides for precision optical coatings
Author(s): XiLin Yao; ChangXin Xiong; ChangCheng Yang; NanChun Tong
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Paper Abstract

In this paper, a novel method, changeable wavelength optical thickness monitoring with quartz crystal thickness monitoring, is firstly outlined for monitoring non-quarter wave thickness. For several multi-layer optical coatings with high performance, a lot of deposition experiments with the ion-assisted deposition technique have firstly done about optical materials SiO2, Ti3O5, and Ta2O5 at room temperature, in order to obtain high dense and low absorbance layers from VIS to NIR wave band. Using the reverse synthesis method, the refractive index, extinction coefficient and tooling factor value of these materials have been obtained accurately. With the above monitoring method, we have then successfully manufactured some multi-layer optical coatings on Bak7 glass and sapphire substrates, and the multi-layer optical coatings have past environmental tests. The appropriate deposition technique parameters and the typical problems about indirect optical thickness monitoring from the deposition process are detailedly discussed in this paper.

Paper Details

Date Published: 14 November 2007
PDF: 8 pages
Proc. SPIE 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 672224 (14 November 2007); doi: 10.1117/12.783121
Show Author Affiliations
XiLin Yao, Huazhong Institute of Electro and Optics (China)
ChangXin Xiong, Huazhong Institute of Electro and Optics (China)
ChangCheng Yang, Huazhong Institute of Electro and Optics (China)
NanChun Tong, Huazhong Institute of Electro and Optics (China)


Published in SPIE Proceedings Vol. 6722:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies

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