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Proceedings Paper

Study on CCOS fabrication technology for super-smooth parabolic surface of light-weight SiC mirror
Author(s): Qing-lan Xu; Fan Wu; Yongjian Wan; Lin Luo; Pingqi Gao
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Paper Abstract

This paper presents a kind of precision fabrication process integrating CCOS polishing with bowl-feed polishing and small tools for grinding is adopted. By analyzing and testing the parameters of each procedure of optical fabricating process of SiC mirror, Φ140mm pressure-burned lightweight SiC parabolic surface is implemented, and the surface figure with high accuracy (PV=0.16λ. RMS=0.026λ, λ=0.6328μm) and super smooth surface (Surface roughness RMS=0.94nm,Ra=0.61nm) are obtained, thus providing a technology support to optical fabrication of hard material aspheric mirror made by CCOS.

Paper Details

Date Published: 14 November 2007
PDF: 7 pages
Proc. SPIE 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 672223 (14 November 2007); doi: 10.1117/12.783116
Show Author Affiliations
Qing-lan Xu, Institute of Optics and Electronics (China)
Fan Wu, Institute of Optics and Electronics (China)
Yongjian Wan, Institute of Optics and Electronics (China)
Lin Luo, Institute of Optics and Electronics (China)
Pingqi Gao, Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 6722:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies

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