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Proceedings Paper

New parallel plate interferometer for measuring angular displacement
Author(s): Defeng Zheng; Xiangzhao Wang; Osami Sasaki
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Paper Abstract

A parallel plate interferometer with a reflecting mirror for measuring angular displacement is proposed. A deflection angle of a beam caused by an angular displacement is amplified by use of a reflecting mirror to increase the optical path difference (OPD) in a plane-parallel plate, which provides high sensitivity of phase measurement. Detection of light transmitted through the plane-parallel plate with a position sensitive detector (PSD) enables high accurate measurement of the initial angle of incidence to the plane-parallel plate with insensitivity to stray light. The improved parallel plate interferometer achieves a measurement repeatability of 10-8 rad.

Paper Details

Date Published: 27 November 2007
PDF: 9 pages
Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 67230Z (27 November 2007); doi: 10.1117/12.783074
Show Author Affiliations
Defeng Zheng, Shanghai Institute of Optics and Fine Mechanics (China)
Graduate School of Chinese Academy of Sciences (China)
Xiangzhao Wang, Shanghai Institute of Optics and Fine Mechanics (China)
Osami Sasaki, Niigata Univ. (Japan)


Published in SPIE Proceedings Vol. 6723:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Junhua Pan; James C. Wyant; Hexin Wang, Editor(s)

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