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Proceedings Paper

Method for eliminating the influence of light intensity modulation in sinusoidal phase modulating laser diode interferometer
Author(s): Zhongliang Li; Xiangzhao Wang; Bingjie Huang; Peng Bu; Defeng Zheng
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Paper Abstract

In a conventional sinusoidal phase-modulating laser-diode (SPM-LD) interferometer, the wavelength of LD is sinusoidally modulated by varying its injection current. However, the intensity modulation is associated with wavelength modulation, which affects the measurement accuracy. We propose here a method to eliminate the effect of intensity modulation by choosing appropriate modulation depth for sinusoidal phase modulation in a SPM-LD interferometer. The method is verified by computer simulation and experiment for real-time displacement measurement. The measurement accuracy has been improved and the measurement repeatability is less than 1 nm.

Paper Details

Date Published: 17 January 2008
PDF: 6 pages
Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 67230Y (17 January 2008); doi: 10.1117/12.783072
Show Author Affiliations
Zhongliang Li, Shanghai Institute of Optics and Fine Mechanics (China)
Graduate Univ. of Chinese Academy of Sciences (China)
Xiangzhao Wang, Shanghai Institute of Optics and Fine Mechanics (China)
Graduate Univ. of Chinese Academy of Sciences (China)
Bingjie Huang, Shanghai Institute of Optics and Fine Mechanics (China)
Graduate Univ. of Chinese Academy of Sciences (China)
Peng Bu, Shanghai Institute of Optics and Fine Mechanics (China)
Graduate Univ. of Chinese Academy of Sciences (China)
Defeng Zheng, Shanghai Institute of Optics and Fine Mechanics (China)
Graduate Univ. of Chinese Academy of Sciences (China)


Published in SPIE Proceedings Vol. 6723:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Junhua Pan; James C. Wyant; Hexin Wang, Editor(s)

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