Share Email Print
cover

Proceedings Paper

Effect of annealing temperature on AIN thin films prepared by D.C. magnetism filter arc deposition
Author(s): Haifeng Liang; Yan Liu; Changlong Cai
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Aluminum nitride (AlN) thin films have attracted much attention because of its more excellent properties and are widely applied to different fields. In our work, AlN thin films were grown on silicon substrate bying using D.C. magnetism filter arc deposition. Various annealing temperature of 573K, 773K, 973K, 1173K were used to process AlN thin films. Microscopy, ellpsometry and XRD were carried out to character films' properties. The results show that the films' refractive index and the extinction coefficient, processed in different annealing temperature, presented small float and were all less than 5 X 10-3, respectively. Furthermore, from microscopy graph, we can see that the film, annealed in 573-973K temperature, were all un-cracked, uniformity and denser. However, the films show cracking when the annealing temperature reaches 1173K°C. In addition, the XRD spectrum of AlN films show 002 preferred orientation with 973K annealing temperature and show abroad band peaks without annealing.

Paper Details

Date Published: 29 November 2007
PDF: 6 pages
Proc. SPIE 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 67221V (29 November 2007); doi: 10.1117/12.783031
Show Author Affiliations
Haifeng Liang, Xi'an Univ. of Technology (China)
Yan Liu, Xi'an Univ. of Technology (China)
Changlong Cai, Xi'an Univ. of Technology (China)


Published in SPIE Proceedings Vol. 6722:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies

© SPIE. Terms of Use
Back to Top