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Proceedings Paper

Stratified scattering model for inhomogeneous dielectric multilayer coatings
Author(s): H. H. Hou; Y. Fan; C. R. Xue; J. H. Xing
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Paper Abstract

A stratified model for scattering from multilayer coatings due to roughness of inhomogeneous interfaces is introduced in the paper. It assumes that a rough interface between two media of multilayer coatings consists of a series of very thin, homogeneous sub-layers and that there is an exponential increase in refractive indices of those sub-layers. Matrix method was used to deduce the formulation for calculating the total integrated scattering (TIS). ZrO2 coatings were deposited on BK7 glass by electron beam evaporation, and their scattering properties were measured and calculated by the scatterometer, the stratified scattering model and the existing uncorrelated surface roughness model, respectively. It is shown that the calculated results based on predictions of the stratified scattering model are in closer correspondence with the experimental data than that obtained with uncorrelated surface roughness model.

Paper Details

Date Published: 14 November 2007
PDF: 7 pages
Proc. SPIE 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 67221I (14 November 2007); doi: 10.1117/12.783006
Show Author Affiliations
H. H. Hou, Changshu Institute of Technology (China)
Y. Fan, Changshu Institute of Technology (China)
C. R. Xue, Shanghai Institute of Optics and Fine Mechanics (China)
J. H. Xing, Changshu Institute of Technology (China)


Published in SPIE Proceedings Vol. 6722:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies

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