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Proceedings Paper

Whole visible range imaging ellipsometry
Author(s): Hau-Wei Wang; Yi-Chen Hsieh; Kai-Ping Chuang; Fu-Shiang Yang; Chun-I Wu
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Paper Abstract

The ellipsometric image contrast for patterned film in whole visible range is simulated and analyzed in this article. By the Fresnel equation and the Jones Matrix, the characteristic wavelength selection method to enhance the image contrast is built. The ellipsometric reflected intensity of specific thin film is nulled into dark by rotating the phase angle of compensator and the azimuth angle of polarizer in whole visible range, which results in higher contrast between non-null and null images after the proper wavelength selection. The approach enables the image defect recognition of patterned film more obvious than recent single wavelength imaging ellipsometry and white light reflective image.

Paper Details

Date Published: 27 November 2007
PDF: 6 pages
Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 67230Q (27 November 2007); doi: 10.1117/12.782996
Show Author Affiliations
Hau-Wei Wang, Mingchi Univ. of Technology (Taiwan)
Yi-Chen Hsieh, Industrial Technology Research Institute (Taiwan)
Kai-Ping Chuang, Industrial Technology Research Institute (Taiwan)
Fu-Shiang Yang, Industrial Technology Research Institute (Taiwan)
Chun-I Wu, Industrial Technology Research Institute (Taiwan)


Published in SPIE Proceedings Vol. 6723:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Junhua Pan; James C. Wyant; Hexin Wang, Editor(s)

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