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Proceedings Paper

Wavefront fitting and evaluation of fiber point diffraction interferometer
Author(s): Shuo Wu; Ding guo Sha; Jia ming Lin; Tao geng Zhou; Ling feng Chen; Liang Nie
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Paper Abstract

This paper presents Zernike polynomials fitting wave front which is detected by fiber point diffraction interferometer (FPDI). To confirm that Zernike polynomials are suitable for fitting concave spherical mirror surface, different orders of Zernike polynomials were used to fit several different surfaces which are produced by computer. Fitting result errors were evaluated by residual standard deviation. It is illuminated that Zernike polynomials are suitable for fitting surface which changes smoothly but not suitable for fitting surface with sharp fluctuating. When the shape changes dramatically Zernike polynomials are unable to correctly fit. Choosing appropriate term of polynomials, more terms don't mean higher precision. A metal coated concave spherical mirror, curvature radius 580mm, caliber 70mm, was measured as a sample. The five-step phase shifting interferograms of good quality were detected by an experimental FPDI which was built in lab. Measured wave front was fitted by 36 terms of Zernike polynomials from phase map which were unwrapped from five-step phase shifting interferograms. The measurement result was obtained and compared with that by Zygo interferometer when measured the same mirror. The 2 represented wave fronts have same characters such as centers bulging and marginal trough.

Paper Details

Date Published: 27 November 2007
PDF: 6 pages
Proc. SPIE 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 67230P (27 November 2007); doi: 10.1117/12.782970
Show Author Affiliations
Shuo Wu, Beijing Institute of Technology (China)
Ding guo Sha, Beijing Institute of Technology (China)
Jia ming Lin, Beijing Institute of Technology (China)
Tao geng Zhou, Beijing Institute of Technology (China)
Ling feng Chen, Beijing Institute of Technology (China)
Liang Nie, Beijing Institute of Technology (China)


Published in SPIE Proceedings Vol. 6723:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Junhua Pan; James C. Wyant; Hexin Wang, Editor(s)

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