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Proceedings Paper

Influence on optical and electrical properties of silver layer by adjoining Ta2O5 layers
Author(s): Pei Zhao; Dingquan Liu; Xiaofeng Xu; Fengshan Zhang
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Paper Abstract

Two kinds of structural film stacks, Ta2O5\Ag and Ta2O5\Ag\Ta2O5, were made for investigating the influence on the optical and electrical properties of ultra-thin Ag film by e adjoining Ta2O5 layers. Different samples were prepared by changing the deposition condition of Ta2O5 with different Argon pressure and sputter power. All samples have a uniform 6nm thickness of Ag layer controlled by deposition time. Optical and electrical measurements were carried out on samples and from the transmission and reflectance spectrum the optical constants can be derived. For Ta2O5\Ag film stacks, from measurement we found that the optical and electrical properties of 6nm Ag film strongly depend on the deposition condition of Ta2O5 layers. The sheet resistance is changed from 12Ω to 31Ω and reflectance is changed from 21% to 46% at 2500nm wavelength, which indicate the difference in Ag layer structure. But for the Ta2O5\Ag\Ta2O5 stacks, the changed deposition condition of the upper Ta2O5 layers just bring slightly shift of the optical and electrical property.

Paper Details

Date Published: 14 November 2007
PDF: 5 pages
Proc. SPIE 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 672212 (14 November 2007); doi: 10.1117/12.782946
Show Author Affiliations
Pei Zhao, Shanghai Institute of Technical Physics (China)
Dingquan Liu, Shanghai Institute of Technical Physics (China)
Xiaofeng Xu, Donghua Univ. (China)
Fengshan Zhang, Shanghai Institute of Technical Physics (China)


Published in SPIE Proceedings Vol. 6722:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies

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