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Proceedings Paper

Analysis on the influencing factors of deformation in bimorph deformable mirror
Author(s): Yu Ning; Wenhan Jiang; Ning Ling; Changhui Rao
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Paper Abstract

Numerical calculation is used to investigate influencing factors on the surface displacement of a bimorph deformable mirror. It's shown that the value of response function is direct proportional to the loading voltage, inverse proportional to the square of the thickness of PZT layer, and increased about 1.4 times when the area of the electrode doubles. Besides, the displacement is closely related to the distance of the control layer from median plane. As a conclusion, the farther electrode contributes the larger deformation. Furthermore, we have discussed the problem of singular solutions at inner and outer boundary.

Paper Details

Date Published: 21 November 2007
PDF: 5 pages
Proc. SPIE 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 67241P (21 November 2007); doi: 10.1117/12.782918
Show Author Affiliations
Yu Ning, Institute of Optics and Electronics (China)
National Univ. of Defense Technology (China)
Wenhan Jiang, Institute of Optics and Electronics (China)
Ning Ling, Institute of Optics and Electronics (China)
Changhui Rao, Institute of Optics and Electronics (China)


Published in SPIE Proceedings Vol. 6724:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
Sen Han; Tingwen Xing; Yanqiu Li; Zheng Cui, Editor(s)

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