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Proceedings Paper

Study on the effects of depositing parameters on the protection performance of plasma polymerized hexamethyldisiloxane coatings
Author(s): Rongfu Zhang; Xumin Zhu; Chao Pan
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Paper Abstract

Aluminium thin film is widely used for high reflectivity reflector. However, it is readily corroded in a variety of environments and in oxygen saturated water. Coatings deposition on it is considered as a way of increasing its corrosion resistance. Among all available deposition techniques, the use of plasma-assisted technologies has grown rapidly. Organosilicon monomers have been successfully used as precursors of Si-based films and among them hexamethyldisiloxane (HMDSO) has gained increasing interest owing to its lower cost and higher deposition rates comparing to similar silicon containing monomers. This work studies the effects of depositing parameters on the structure and composition of the coating and at last on the corrosion protection performance concerning their use as protective coatings on reflective aluminum metallisations. Therefore, we have done a serial of experiments and got corresponding samples with different parameters such as HMDSO glow discharge power and depositing time. In the experiments, the plasma polymerized HMDSO thin films have been obtained in a DC glow discharge from the monomer vapor. And then the corrosion protection performances are analyzed by environment experiments. To analyze the reason of the deposition parameters effect on protection performances, the chemical structure and composition of the films have been analyzed.

Paper Details

Date Published: 16 November 2007
PDF: 4 pages
Proc. SPIE 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 67220Z (16 November 2007); doi: 10.1117/12.782915
Show Author Affiliations
Rongfu Zhang, Univ. of Shanghai for Science and Technology (China)
Xumin Zhu, Univ. of Shanghai for Science and Technology (China)
Chao Pan, Huangshi Institute of Technology (China)


Published in SPIE Proceedings Vol. 6722:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies

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