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Proceedings Paper

Study of magnetic nanostructures fabricated using laser interference lithography
Author(s): Zijun Zhang; Yuxian Guo; Youmei Chen; Yin Liu; Xiangdong Xu; Shaojun Fu; Jie Wang; Pengshou Xu
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Paper Abstract

Magnetic submicron meter structures were fabricated on Co0.9Fe0.1 films by laser interference lithography combined with ion beam etching. The vertical standing wave was restrained by using proper exposure dose and appropriate development time. Hysteresis loops of the magnetic film and magnetic patterns were presented by surface magneto-optical Kerr effect. The difference magnetism between magnetic patterns with different critical sizes and the film was discussed.

Paper Details

Date Published: 21 November 2007
PDF: 5 pages
Proc. SPIE 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 67241J (21 November 2007); doi: 10.1117/12.782895
Show Author Affiliations
Zijun Zhang, Univ. of Science and Technology of China (China)
Yuxian Guo, Univ. of Science and Technology of China (China)
Youmei Chen, Univ. of Science and Technology of China (China)
Yin Liu, Univ. of Science and Technology of China (China)
Xiangdong Xu, Univ. of Science and Technology of China (China)
Shaojun Fu, Univ. of Science and Technology of China (China)
Jie Wang, Univ. of Science and Technology of China (China)
Pengshou Xu, Univ. of Science and Technology of China (China)


Published in SPIE Proceedings Vol. 6724:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
Sen Han; Tingwen Xing; Yanqiu Li; Zheng Cui, Editor(s)

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