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Proceedings Paper

Optimizing the varied line-space grating with the curvature of grating substrate
Author(s): Zhengkun Liu; Bin Liu; Xiangdong Xu; Ying Liu; Yilin Hong; Shaojun Fu
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Paper Abstract

Parameters of two spherical waves are firstly optimized to get the exact groove densities of diffractive gratings. Consequently, the groove density differences between on the plane and on the curved substrates are derived. Therefore, some experimental results are provided to demonstrate the validity of this method above. Meanwhile, the curvatures of the substrates are measured three times by using long trace profiler (LTP), which assures the repeatability of the bending technique for grating substrates. At last, the advantage of this method is exhibited through comparing the errors of grating groove density fabricated by this technique with only two spherical waves.

Paper Details

Date Published: 21 November 2007
PDF: 5 pages
Proc. SPIE 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 67241I (21 November 2007); doi: 10.1117/12.782893
Show Author Affiliations
Zhengkun Liu, Univ. of Science and Technology of China (China)
Bin Liu, Univ. of Science and Technology of China (China)
Hefei Sunshine Optoelectronics Science & Technology Co., Ltd. (China)
Xiangdong Xu, Univ. of Science and Technology of China (China)
Ying Liu, Univ. of Science and Technology of China (China)
Yilin Hong, Univ. of Science and Technology of China (China)
Shaojun Fu, Univ. of Science and Technology of China (China)


Published in SPIE Proceedings Vol. 6724:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
Sen Han; Tingwen Xing; Yanqiu Li; Zheng Cui, Editor(s)

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