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Proceedings Paper

Design of a new MEMS-based tunable grating with electrostatic comb drive
Author(s): Yiting Yu; Weizheng Yuan; Jinghui Xu
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Paper Abstract

A new MEMS-based tunable grating with programmable grating period, driven by electrostatic comb, was designed. Finite element model was developed and finite element simulation was performed with ANSYS. Modal analysis and static analysis were carried out. To improve the calculation efficiency, electrostatic driving force at each movable comb was directly computed by analytical method instead of time-consuming coupled-field analysis. The results show that this MEMS-based tunable grating functions quite well when a driving voltage is provided. To operate at its working resonating mode much easier, thicker grating structure is needed, revealing the necessity in using the bulk micromachining such as SOI technology to fabricate the grating. Also, larger the length of connecting beam and spring beam, and smaller the width of spring beam, larger the deflection we can get for a specific driving voltage. The designed MEMS-based tunable grating can be applied in many fields.

Paper Details

Date Published: 21 November 2007
PDF: 5 pages
Proc. SPIE 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 67241G (21 November 2007); doi: 10.1117/12.782857
Show Author Affiliations
Yiting Yu, Northwestern Polytechnical Univ. (China)
Weizheng Yuan, Northwestern Polytechnical Univ. (China)
Jinghui Xu, Northwestern Polytechnical Univ. (China)


Published in SPIE Proceedings Vol. 6724:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
Sen Han; Tingwen Xing; Yanqiu Li; Zheng Cui, Editor(s)

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