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Proceedings Paper

Fabrication of multilayer laminar grating with high efficiency for extreme ultraviolet
Author(s): Li-Chao Zhang; Hui Lin; Chun-Shui Jin; Hong-Jun Zhou; Tong-Lin Huo
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Paper Abstract

The main goal for investigations on multilayer laminar gratings working at the EUV region is to enhance their efficiency. In this article, we demonstrate a routine to fabricate multilayer laminar gratings with high efficiency. This routine comprises three steps: first, preparing grating substrates with ideal groove profile and low roughness by holographic recording and ion beam etching process; second, optimizing fabricating techniques to obtain multilayer coatings with high reflectivity; third, strictly controlling errors of multilayer grating parameters to ensure the coinciding of the optical performance with the expectation. Results demonstrate that this routine is feasible. The measured peak efficiency of -1 order at 12.8nm was 14.3%. Some related issues about efficiency curves such as wavelength separation and suppression of zero order are discussed.

Paper Details

Date Published: 29 November 2007
PDF: 6 pages
Proc. SPIE 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 67220L (29 November 2007); doi: 10.1117/12.782851
Show Author Affiliations
Li-Chao Zhang, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Graduate School of the Chinese Academy of Sciences (China)
Hui Lin, Tsinghua Univ. (China)
Chun-Shui Jin, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Hong-Jun Zhou, Univ. of Science and Technology of China (China)
Tong-Lin Huo, Univ. of Science and Technology of China (China)


Published in SPIE Proceedings Vol. 6722:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies

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