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Proceedings Paper

Development of a new optical acceleration sensor
Author(s): Shuhai Jia; Jia Yang; Weijun Kong; Yanfen Du
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Paper Abstract

A novel optical acceleration sensor based on optical fiber and MEMS technology is presented in this paper. It can effectively solve the problem of low immunity of inertial sensors and can be used in navigation system towards the Electro Magnetic Interference (EMI) and Electro Magnetic Pulse (EMP). A Fresnel diffractive micro lens is fabricated with a glass substrate. A reflecting membrane is placed behind the diffractive micro lens in parallel and its displacement is determined by acceleration. The sensing principle of the sensor is to calculate acceleration by measuring variousl light intensity at the frontal focal point of the diffractive micro lens. Moreover, the performance of sensor was analyzed. The results of analysis and computer simulation indicated that the design is logical and feasible. The results of proof-of-principle experiments indicate that the principle of this novel sensor is true and it has merits of simple structure and high sensitivity.

Paper Details

Date Published: 21 November 2007
PDF: 5 pages
Proc. SPIE 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 672418 (21 November 2007); doi: 10.1117/12.782837
Show Author Affiliations
Shuhai Jia, Xi'an Jiaotong Univ. (China)
Jia Yang, Xi'an Jiaotong Univ. (China)
Weijun Kong, Xi'an Jiaotong Univ. (China)
Yanfen Du, Xi'an Jiaotong Univ. (China)


Published in SPIE Proceedings Vol. 6724:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
Sen Han; Tingwen Xing; Yanqiu Li; Zheng Cui, Editor(s)

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