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Proceedings Paper

Characterization of materials and film stacks for accurate surface topography measurement using a white-light optical profiler
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Paper Abstract

Pupil-Plane Scanning White-Light Interferometry measures reflectivity as a function of angle of incidence, wavelength and polarization in one location of an object surface. This information is converted into ellipsometric information and allows the characterization of material optical properties and layer thickness in the case of layered structures. We illustrate the capability of the method by measuring the thickness and refractive index of thin film standards. The information is also used to create accurate 3D topography maps of complex object structures.

Paper Details

Date Published: 25 April 2008
PDF: 9 pages
Proc. SPIE 6995, Optical Micro- and Nanometrology in Microsystems Technology II, 69950P (25 April 2008); doi: 10.1117/12.782836
Show Author Affiliations
X. Colonna de Lega, Zygo Corp. (United States)
Peter J. de Groot, Zygo Corp. (United States)


Published in SPIE Proceedings Vol. 6995:
Optical Micro- and Nanometrology in Microsystems Technology II
Christophe Gorecki; Anand Krishna Asundi; Wolfgang Osten, Editor(s)

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