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Proceedings Paper

Research on the AI-AIN granular films prepared by D.C. magnetism filter arc deposition
Author(s): Haifeng Liang; Yang Zhou; Changlong Cai
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Paper Abstract

Aluminum- Aluminum nitride (Al-AlN) granular films were grown on silicon substrate by using D.C. magnetism filter arc deposition. X-ray diffraction, X-ray photoelectron spectroscopy, optical microscopy, surface profiler were carried out to character films' properties. The crystalline orientation, chemical content, surface morphology were researched. The result shows that the films mainly consist of aluminum and nitrogen elements from XPS spectrum, and aluminum and aluminum nitride interfere peak in XRD spectrum were all observed. Furthermore, no metal macro-droplet can be observed from surface morphology.

Paper Details

Date Published: 14 November 2007
PDF: 8 pages
Proc. SPIE 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 67220D (14 November 2007); doi: 10.1117/12.782828
Show Author Affiliations
Haifeng Liang, Xi'an Technological Univ. (China)
Yang Zhou, Xi'an Technological Univ. (China)
Changlong Cai, Xi'an Technological Univ. (China)


Published in SPIE Proceedings Vol. 6722:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies

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