Share Email Print
cover

Proceedings Paper

High efficiency arrangement in comb-drive actuators
Author(s): Xing Chen; Dong Weon Lee; Jun Ding
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

This paper presents a new comb-drive actuator arrangement that has a large displacement with low driving voltage and relatively small footprint. The new arrangements in the comb drivers can provide both pulling forces and pushing forces as compared to conventional drivers that only provide pulling forces, therefore additional displacements are achieved without increasing the driving voltage. This arrangement is verified numerically using FEM and the simulation results are consistent with the values derived from the mathematical model. The results show an obviously enhanced displacement and a compact layout.

Paper Details

Date Published: 19 November 2007
PDF: 6 pages
Proc. SPIE 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 67240Q (19 November 2007); doi: 10.1117/12.782684
Show Author Affiliations
Xing Chen, Chonnam National Univ. (South Korea)
Dong Weon Lee, Chonnam National Univ. (South Korea)
Jun Ding, Chonnam National Univ. (South Korea)


Published in SPIE Proceedings Vol. 6724:
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
Sen Han; Tingwen Xing; Yanqiu Li; Zheng Cui, Editor(s)

© SPIE. Terms of Use
Back to Top