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Proceedings Paper

Fabrication of microfluidic networks using a high power femtosecond fiber laser
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Paper Abstract

Photolithography is well established in the fabrication of microfluidic networks; however, it is difficult to fabricate designs which require multiple depths. Furthermore, the cost/time to produce photolithographic masks is problematic, particularly when prototyping. Here we describe fabrication of microfluidic branching networks with multi-depth structures, ranging from 10s to 100s of microns, using a femtosecond fiber laser with 10 W average power, followed by chemical etching in a 10:1 solution of 49% HF and 69% HNO3. While this technique was originally developed using a nanosecond laser, this unique femtosecond laser enables greater processing precision and faster overall processing speed.

Paper Details

Date Published: 12 May 2008
PDF: 5 pages
Proc. SPIE 7005, High-Power Laser Ablation VII, 70050E (12 May 2008); doi: 10.1117/12.782655
Show Author Affiliations
Lawrence Shah, IMRA America, Inc. (United States)
Dong Hyuck Kam, The Univ. of Michigan (United States)
Jyotirmoy Mazumder, The Univ. of Michigan (United States)

Published in SPIE Proceedings Vol. 7005:
High-Power Laser Ablation VII
Claude R. Phipps, Editor(s)

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